MEMS device for detection of cancer cells (Paperback) (ISBN-13: 9781835800072)

MEMS, the acronym of "Micro Electro Mechanical Systems", are generally considered

as micro systems consisting of micro mechanical sensors, actuators and microelectronic circuits

integrated in a single chip. Micro means one millionth (1/1000000). A thickness of a human

hair is 100 times than that of a micron [1]. This means that it is an extremely small value

and so its fabrication needs to be taken intensive care of.

As microelectronics is a well-developed technology, the research and development of MEMS is

concentrated on the research and development of micro mechanical

sensors and actuators, or micro electromechanical transducers.